| 引用本文: | 孟祥忠,刘作宗.QFT在高速线性电机直接驱动平面运动定位控制系统中的应用[J].控制理论与应用,2006,23(2):225~228.[点击复制] |
| MENG Xiang-zhong ,LIU Zuo-zong.Application of QFT to high speed linear motor direct-drive table positioning control system[J].Control Theory and Technology,2006,23(2):225~228.[点击复制] |
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| QFT在高速线性电机直接驱动平面运动定位控制系统中的应用 |
| Application of QFT to high speed linear motor direct-drive table positioning control system |
| 摘要点击 1334 全文点击 1042 投稿时间：2004-07-27 修订日期：2005-08-11 |
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| DOI编号 10.7641/j.issn.1000-8152.2006.2.012 |
| 2006,23(2):225-228 |
| 中文关键词 定量反馈理论 鲁棒控制设计 运动定位系统 直线电机直接驱动 |
| 英文关键词 quantitative feedback theory robust control design positioning motion system linear motor direct drive |
| 基金项目 |
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| 中文摘要 |
| 研究定量反馈理论(QFT)在高速直线电机直接驱动平面运动定位系统控制中的应用问题.该系统采用三闭环(即电流,速度,位置)串级反馈控制加前馈补偿结构.基于8台不同机器上实际测得的频域特性,所设计的QFT高阶鲁棒控制器可以大大降低该系统在大加速度运动状态下所呈现的谐振不确定性.同时,该控制器对传感器噪声和干扰也具有较好的抑制能力.在最大加速度达到6.8g的给定运动轨迹条件下,通过在批量生产的打线机(用于半导体封装)平面运动定位系统的实验结果证实了该方法的有效性. |
| 英文摘要 |
| This paper investigates the application of quantitative feedback theory(QFT) to high speed linear motor direct-drive X-Y table positioning system.The system consists of a cascade feedback control structure plus an auto-tuning feedfoward compensator.The robust high-order QFT controller,based on the measured frequency responses on 8 different mass-produced machines in the same batch,is specially designed to reduce resonance uncertainties.This controller also has the advantage in attenuating the external disturbances and noises in the sensor when the machines are operated at high acceleration.Implementation results of profile motion with a maximum acceleration of 6.8 g(1g = 9.81 m/s2) are carried out on mass-produced machines to confirm the effectiveness of the control strategy. |