| 引用本文: | 潘春荣,王际鹏.具有多品种晶圆混合加工的单臂组合设备调度[J].控制理论与应用,2016,33(9):1171~1181.[点击复制] |
| PAN Chun-rong,WANG Ji-peng.Scheduling for single-armed cluster tools with mixed-processing of multi-variety wafers[J].Control Theory and Technology,2016,33(9):1171~1181.[点击复制] |
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| 具有多品种晶圆混合加工的单臂组合设备调度 |
| Scheduling for single-armed cluster tools with mixed-processing of multi-variety wafers |
| 摘要点击 3037 全文点击 1413 投稿时间：2016-02-27 修订日期：2016-05-16 |
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| DOI编号 10.7641/CTA.2016.60104 |
| 2016,33(9):1171-1181 |
| 中文关键词 组合设备 Petri网 混合加工 调度 晶圆制造 |
| 英文关键词 cluster tools Petri net mixed-processing scheduling wafer fabrication |
| 基金项目 国家自然科学基金项目(71361014, 51665018), 江西省教育厅项目(GJJ150673)资助. |
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| 中文摘要 |
| 为了提高晶圆制造中组合设备的生产效率, 在考虑晶圆驻留时间约束条件下, 研究没有共享加工模块的多
品种晶圆混合加工的单臂组合设备调度问题. 首先, 采用面向资源的Petri网模型描述多种晶圆产品的混合加工过
程, 引入控制变迁避免模型的死锁, 采用赋时库所和赋时变迁模拟系统资源的活动时间. 其次, 通过虚拟加工的方
法平衡工序的负载, 基于系统Petri网模型和拉式调度策略, 推导出单臂组合设备在多品种晶圆混合加工情形下的可
调度性判定条件, 并以解析形式描述. 最后, 提出了系统稳态调度求解算法并以实例验证了算法的有效性和可行性. |
| 英文摘要 |
| To improve the production efficiency of cluster tools, wafer residency time constraints considered and without
PM sharing, scheduling of single-armed cluster tools with mixed-processing of multi-variety wafers are addressed. Firstly,
a resource-oriented Petri net (ROPN) model is developed to describe the wafer fabrication process. Controlled transitions
are introduced into models to avoid deadlock, and time is associated with places and transitions to model activity times.
Secondly, workloads among the processing steps are balanced via virtual process modules. Analytic expressions for testing
schedulability are derived based on the Petri net and backward scheduling strategy. Finally, a scheduling algorithm for
the steady state is presented. Meanwhile, illustrative examples are given to verify the validity of the scheduling algorithm
proposed. |
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