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Analysis and modeling of hysteresis of piezoelectric micro-actuator used in high precision dual-stage servo system
M.A.Rahman,A.AlMamun,K.Yao
0
(Department of Electrical and Computer Engineering, National University of Singapore)
摘要:
A dual-stage servo system consists of a primary coarse actuator for facilitating large motion and a secondary micro-actuator for small but precise motion to improve tracking performance. Piezoelectric micro-actuator made from lead zirconate titanate (PZT) has been a popular choice for the secondary stage. However, the advantage gained by the resolution of the secondary PZT actuator is reduced by its inherent hysteresis nonlinearity. Model based hysteresis compensation techniques are preferred due to their simplicity and fast response. Identification and modeling are two substantial parts in such model-based techniques. This paper presents a rigorous analysis and modeling of the hysteresis of PZT micro-actuator. Modified Generalized Prandtl-Ishlinskii and Coleman-Hodgdon models are studied. Identification of the model through nonlinear least square and particle swarm optimization are examined and compared. Several analyses are done through tuning of the model parameters and identification techniques. Experimental analysis and simulation results underscore the effectiveness of this modeling approach. Finally as a design example, a dual-stage simulation analysis is done to show the effectiveness of systematic modeling on hysteresis compensation.
关键词:  Hysteresis, particle swarm optimization (PSO), modified generalized Prandtl-Ishlinskii (GPI), inverse GPI
DOI:
Received:October 30, 2014Revised:March 25, 2015
基金项目:
Analysis and modeling of hysteresis of piezoelectric micro-actuator used in high precision dual-stage servo system
M. A. Rahman,A. Al Mamun,K. Yao
(Department of Electrical and Computer Engineering, National University of Singapore;Institute of Materials Research and Engineering, A*STAR)
Abstract:
A dual-stage servo system consists of a primary coarse actuator for facilitating large motion and a secondary micro-actuator for small but precise motion to improve tracking performance. Piezoelectric micro-actuator made from lead zirconate titanate (PZT) has been a popular choice for the secondary stage. However, the advantage gained by the resolution of the secondary PZT actuator is reduced by its inherent hysteresis nonlinearity. Model based hysteresis compensation techniques are preferred due to their simplicity and fast response. Identification and modeling are two substantial parts in such model-based techniques. This paper presents a rigorous analysis and modeling of the hysteresis of PZT micro-actuator. Modified Generalized Prandtl-Ishlinskii and Coleman-Hodgdon models are studied. Identification of the model through nonlinear least square and particle swarm optimization are examined and compared. Several analyses are done through tuning of the model parameters and identification techniques. Experimental analysis and simulation results underscore the effectiveness of this modeling approach. Finally as a design example, a dual-stage simulation analysis is done to show the effectiveness of systematic modeling on hysteresis compensation.
Key words:  Hysteresis, particle swarm optimization (PSO), modified generalized Prandtl-Ishlinskii (GPI), inverse GPI